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Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorPerova, Natalia A.
dc.contributor.authorDe Moor, Piet
dc.contributor.authorDu Bois, Bert
dc.contributor.authorGoessens, Claus
dc.contributor.authorGrietens, Bob
dc.contributor.authorVerbist, Agnes
dc.contributor.authorVermeiren, Jan
dc.date.accessioned2021-10-15T05:22:12Z
dc.date.available2021-10-15T05:22:12Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7796
dc.sourceIIOimport
dc.titleMicromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.source.peerreviewno
dc.source.beginpage54
dc.source.endpage63
dc.source.conferenceMEMS/MOEMS: Advances in Photonics Communications, Sensing, Metrology, Packaging and Assembly
dc.source.conferencedate28/10/2002
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 4945


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