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Strained Si and strained SiGe fabrication schemes using (selective) epitaxial growth in a RPCVD system
Publication:
Strained Si and strained SiGe fabrication schemes using (selective) epitaxial growth in a RPCVD system
Date
2003
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Delhougne, Romain
;
Meunier-Beillard, Philippe
;
Caymax, Matty
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1915
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
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Views
1915
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations