Publication:
Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson HighlandsTM chamber
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1952 since deposited on 2021-10-15
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Acq. date: 2026-01-09
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1952 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-01-09
Citations