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Reliability of RF-MEMS: stress relaxation in Al-alloy films

dc.contributor.authorModlinski, Robert
dc.contributor.authorChen, Q.
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRatchev, Petar
dc.contributor.authorPuers, Bob
dc.contributor.authorden Toonder, J.M.J.
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T05:45:32Z
dc.date.available2021-10-15T05:45:32Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7906
dc.sourceIIOimport
dc.titleReliability of RF-MEMS: stress relaxation in Al-alloy films
dc.typeMeeting abstract
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conference14th MicroMechanics Europe Workshop
dc.source.conferencedate2/11/2003
dc.source.conferencelocationDelft The Netherlands
imec.availabilityPublished - imec
imec.internalnotesabstract and poster only


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