Authors

Pawlak, Bartek; Lindsay, Richard; Vandervorst, Wilfried; Kittl, Jorge; Surdeanu, Radu; Duffy, Ray; Stolk, P.

Conference

Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.

Title

Chemical and electrical dopant evolution during solid phase epitaxial regrowth

Publication type

Proceedings paper