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Line-edge roughness reduction and CD slimming using hardback processing

dc.contributor.authorPeters, R.D.
dc.contributor.authorLucas, K.
dc.contributor.authorCobb, J.L.
dc.contributor.authorParker, C.
dc.contributor.authorPatterson, K.
dc.contributor.authorMcCauley, R.
dc.contributor.authorErcken, Monique
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorPollentier, Ivan
dc.date.accessioned2021-10-15T06:05:50Z
dc.date.available2021-10-15T06:05:50Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7997
dc.sourceIIOimport
dc.titleLine-edge roughness reduction and CD slimming using hardback processing
dc.typeProceedings paper
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorVan Roey, Frieda
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1131
dc.source.endpage1142
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XVII
dc.source.conferencedate24/02/2003
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 5038


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