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A practical baseline process for advanced CMOS devices research

dc.contributor.authorPonomarev, Youri
dc.contributor.authorLoo, Josine
dc.contributor.authorRittersma, Chris
dc.contributor.authorLander, Rob
dc.contributor.authorHooker, Jacob
dc.contributor.authorDoornbos, Gerben
dc.contributor.authorSurdeanu, Radu
dc.contributor.authorCubaynes, Florence
dc.contributor.authorDachs, Charles
dc.contributor.authorKubicek, Stefan
dc.contributor.authorHenson, Kirklen
dc.contributor.authorLindsay, Richard
dc.date.accessioned2021-10-15T06:13:44Z
dc.date.available2021-10-15T06:13:44Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8032
dc.sourceIIOimport
dc.titleA practical baseline process for advanced CMOS devices research
dc.typeProceedings paper
dc.contributor.imecauthorDoornbos, Gerben
dc.contributor.imecauthorKubicek, Stefan
dc.source.peerreviewno
dc.source.beginpage27
dc.source.endpage30
dc.source.conferenceProceedings 33rd European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate16/09/2003
dc.source.conferencelocationEstoril Portugal
imec.availabilityPublished - imec


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