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Impact of shallow trench isolation depth on leakage current of shallow p-n junctions

dc.contributor.authorPoyai, Amporn
dc.contributor.authorRittaporn, I.
dc.contributor.authorRooyackers, Rita
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-15T06:14:11Z
dc.date.available2021-10-15T06:14:11Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8034
dc.sourceIIOimport
dc.titleImpact of shallow trench isolation depth on leakage current of shallow p-n junctions
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage186
dc.source.conferenceProceedings of the 29th Congress on Science and Technology of Thailand - STT29
dc.source.conferencedate20/10/2003
dc.source.conferencelocationKhon Kean Thailand
imec.availabilityPublished - imec


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