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Integration of ALD WCN into a dual damascene oxide module

dc.contributor.authorSchuhmacher, Jörg
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVos, Ingrid
dc.contributor.authorSutcliffe, Victor
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBesling, W.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T06:35:40Z
dc.date.available2021-10-15T06:35:40Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8125
dc.sourceIIOimport
dc.titleIntegration of ALD WCN into a dual damascene oxide module
dc.typeProceedings paper
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage759
dc.source.endpage765
dc.source.conferenceProceedings of the Advanced Metallization Conference 2002
dc.source.conferencedate1/10/2002
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


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