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Deep levels in oxygenated n-type high-resistivity FZ silicon before and after a low-temperature hydrogenation step
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Authors
Simoen, Eddy
;
Claeys, Cor
;
Job, R.
;
Ulyashin, A.G.
;
Fahrner, W.R.
;
Tonelli, G.
;
De Gryse, O.
;
Clauws, P.
Issue
9
Journal
Journal of the Electrochemical Society
Volume
150
Title
Deep levels in oxygenated n-type high-resistivity FZ silicon before and after a low-temperature hydrogenation step
Publication type
Journal article
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