Deep levels in oxygenated n-type high-resistivity FZ silicon before and after a low-temperature hydrogenation step

Publication:

2003

Journal article

Author(s)

;

;

;

;

;

;

;

Journal of the Electrochemical Society

1996 since deposited on 2021-10-15

2last month

2last week

Acq. date: 2026-08-08