A deep level study of high-temperature electron-irradiated n-type Cz silicon

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Authors
Simoen, Eddy; Claeys, Cor; Neimash, V.; Kraitchinskii, A.; Kras'ko, M.; Tishenko, V.; Voitovich, V.
Conference
Gettering and Defect Engineering in Semiconductor Technology - GADEST
Title
A deep level study of high-temperature electron-irradiated n-type Cz silicon
Publication type
Oral presentation
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