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Noise diagnostics of advanced silicon substrates and deep submicron process modules

dc.contributor.authorSimoen, Eddy
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-15T06:40:20Z
dc.date.available2021-10-15T06:40:20Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8144
dc.sourceIIOimport
dc.titleNoise diagnostics of advanced silicon substrates and deep submicron process modules
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage420
dc.source.endpage439
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate28/04/2003
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 2003-03


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