Publication:

Gate isolation technology for compact poly-CMP embedded flash memories

Date

2003

Proceedings Paper

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Author(s)

Slotboom, Michiel

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;

;

Van Duuren, Michiel

;

;

Wouters, Johan M. D.

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;

Leray, Philippe

;

Baerts, Christina

;

;

Pollentier, Ivan

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2022 since deposited on 2021-10-15

Acq. date: 2026-09-13