Gate isolation technology for compact poly-CMP embedded flash memories

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Authors
Slotboom, Michiel; Goarin, Pierre; Akil, Nader; Van Duuren, Michiel; Demand, Marc; Wouters, Johan M. D.; Beckx, Stephan; Leray, Philippe; Baerts, Christina; Heylen, Nancy; Pollentier, Ivan
Conference
33rd European Solid-State Devices Research Conference - ESSDERC
Title
Gate isolation technology for compact poly-CMP embedded flash memories
Publication type
Proceedings paper
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