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Gate isolation technology for compact poly-CMP embedded flash memories

dc.contributor.authorSlotboom, Michiel
dc.contributor.authorGoarin, Pierre
dc.contributor.authorAkil, Nader
dc.contributor.authorVan Duuren, Michiel
dc.contributor.authorDemand, Marc
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBeckx, Stephan
dc.contributor.authorLeray, Philippe
dc.contributor.authorBaerts, Christina
dc.contributor.authorHeylen, Nancy
dc.contributor.authorPollentier, Ivan
dc.date.accessioned2021-10-15T06:44:00Z
dc.date.available2021-10-15T06:44:00Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8158
dc.sourceIIOimport
dc.titleGate isolation technology for compact poly-CMP embedded flash memories
dc.typeProceedings paper
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.source.peerreviewno
dc.source.conference33rd European Solid-State Devices Research Conference - ESSDERC
dc.source.conferencedate16/09/2003
dc.source.conferencelocationEstoril Portugal
imec.availabilityPublished - imec


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