A new power MEMS component with variable capacitance

Thumbnail
Metadata
Show full item record
Authors
Sterken, Tom; Baert, Kris; Puers, Bob; Borghs, Gustaaf; Mertens, Robert
Conference
Proceedings Pan Pacific Microelectronics Symposium
Title
A new power MEMS component with variable capacitance
Publication type
Proceedings paper
Collections