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A new power MEMS component with variable capacitance

dc.contributor.authorSterken, Tom
dc.contributor.authorBaert, Kris
dc.contributor.authorPuers, Bob
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-15T06:49:38Z
dc.date.available2021-10-15T06:49:38Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8180
dc.sourceIIOimport
dc.titleA new power MEMS component with variable capacitance
dc.typeProceedings paper
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.imecauthorMertens, Robert
dc.source.peerreviewno
dc.source.beginpage27
dc.source.endpage34
dc.source.conferenceProceedings Pan Pacific Microelectronics Symposium
dc.source.conferencedate18/02/2003
dc.source.conferencelocationKohala Coast USA
imec.availabilityPublished - imec


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