Publication:
Fabrication of Pseudomorphic AlGaAs/InGaAs HEMTs Using CH4/H2 RIE for Gate Recessing
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1985 since deposited on 2021-09-29
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Acq. date: 2026-04-05
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Statistics
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1985 since deposited on 2021-09-29
1last month
1last week
Acq. date: 2026-04-05
Citations