Publication:

Pre-amorphization and co-implantation suitability for advanced PMOS devices integration

Date

2003

Proceedings Paper

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Author(s)

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Lindsay, Richard

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Doornbos, Gerben

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Ponomarev, Youri

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Henson, Kirklen

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Statistics

1975 since deposited on 2021-10-15

Acq. date: 2026-02-26