Copper seed layer scaling for advanced interconnects: extendibility of I-PVD

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Authors
Tokei, Zsolt; Demuynck, Steven; Vervoort, Iwan; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen
Conference
Proceedings of the Advanced Metallization Conference 2002
Title
Copper seed layer scaling for advanced interconnects: extendibility of I-PVD
Publication type
Proceedings paper
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