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Performance comparison of sub 1nm sputtered TiN/HfO2 nMOS and pMOSFETs
Publication:
Performance comparison of sub 1nm sputtered TiN/HfO2 nMOS and pMOSFETs
Date
2003-12
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tsai, Wilman
;
Ragnarsson, Lars-Ake
;
Pantisano, Luigi
;
Chen, P.
;
Onsia, Bart
;
Schram, Tom
;
Cartier, E.
;
Kerber, Andreas
;
Young, Edward
;
Caymax, Matty
;
De Gendt, Stefan
;
Heyns, Marc
Journal
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1974
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1974
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations