Authors

van den Berg, J.A.; Werner, M.; Armour, D.G.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.

Conference

Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.

Title

Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si

Publication type

Meeting abstract