Scalability of MOCVD-deposited Hafnium oxide

Thumbnail
Metadata
Show full item record
Authors
Van Elshocht, Sven; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; Date, Lucien; De Gendt, Stefan; Kaushik, Vidya; Kerber, Andreas; Kluth, J.; Lujan, Guilherme; Petry, Jasmine; Pique, Didier; Richard, Olivier; Rohr, Erika; Shimamoto, Yasuhiro; Tsai, Wilman; Heyns, Marc
Conference
CMOS Front-End Materials and Process Technology
Title
Scalability of MOCVD-deposited Hafnium oxide
Publication type
Proceedings paper
Collections