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Carrier illumination as a tool to probe implant dose and electrical activation

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorBrijs, Bert
dc.contributor.authorLoo, Roger
dc.contributor.authorPeytier, Ivan
dc.contributor.authorPawlak, Bartek
dc.contributor.authorBudiarto, E.
dc.contributor.authorBorden, P.
dc.date.accessioned2021-10-15T07:27:09Z
dc.date.available2021-10-15T07:27:09Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8323
dc.sourceIIOimport
dc.titleCarrier illumination as a tool to probe implant dose and electrical activation
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpage758
dc.source.endpage763
dc.source.conferenceCharacterization and Metrology for ULSI Technology
dc.source.conferencedate24/03/2003
dc.source.conferencelocationAustin USA
imec.availabilityPublished - imec
imec.internalnotesAIP Conference Proceedings; Vol. 683


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