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Quantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRM

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorAlvarez, David
dc.contributor.authorFouchier, Marc
dc.contributor.authorXu, Mingwei
dc.date.accessioned2021-10-15T07:28:13Z
dc.date.available2021-10-15T07:28:13Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8327
dc.sourceIIOimport
dc.titleQuantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRM
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.source.peerreviewno
dc.source.conferenceInternational Meeting on Seeing at the Nanoscale
dc.source.conferencedate24/08/2003
dc.source.conferencelocationSanta Barbara, CA USA
imec.availabilityPublished - imec


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