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Anisotropic etching of silicon in a two-component alkaline solution
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Authors
Vazsonyi, E.
;
Vertesy, Z.
;
Toth, A.
;
Szlufcik, Jozef
Issue
2
Journal
Journal of Micromechanics and Microengineering
Volume
13
Title
Anisotropic etching of silicon in a two-component alkaline solution
Publication type
Journal article
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