Authors

Veloso, Anabela; Cubaynes, Florence; Rothschild, Aude; Mertens, Sofie; Degraeve, Robin; O'Connor, Robert; Olsen, Chris; Date, Lucien; Schaekers, Marc; Dachs, Charles; Jurczak, Gosia

Conference

33rd European Solid-State Devices Research Conference - ESSDERC

Title

Ultra-thin oxynitride gate dielectrics by pulsed-RF DPN for 65 nm general purpose CMOS applications

Publication type

Proceedings paper