Show simple item record

Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank

dc.contributor.authorVereecke, Guy
dc.contributor.authorVos, Rita
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorSchmidt, M.O.
dc.contributor.authorBaeyens, Martien
dc.contributor.authorGomme, Steven
dc.contributor.authorSnow, Jim
dc.contributor.authorCoenen, V.
dc.contributor.authorMertens, Paul
dc.contributor.authorBauer, T.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-15T07:39:15Z
dc.date.available2021-10-15T07:39:15Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8367
dc.sourceIIOimport
dc.titleInfluence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage143
dc.source.endpage147
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2002 - UCPSS
dc.source.conferencedate16/09/2002
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid-State Phenomena; Vol. 92


Files in this item

Thumbnail
Name:
7809.pdf
Size:
285.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record