Resolving line collapse in 193nm lithography with surfactinated post develop rinse solutions
dc.contributor.author | Versluijs, Janko | |
dc.contributor.author | Misat, Sylvain Irénée | |
dc.contributor.author | Maenhoudt, Mireille | |
dc.contributor.author | Grozev, Grozdan | |
dc.contributor.author | Furusho, Tetsunari | |
dc.date.accessioned | 2021-10-15T07:43:24Z | |
dc.date.available | 2021-10-15T07:43:24Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8383 | |
dc.source | IIOimport | |
dc.title | Resolving line collapse in 193nm lithography with surfactinated post develop rinse solutions | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Versluijs, Janko | |
dc.contributor.imecauthor | Grozev, Grozdan | |
dc.source.peerreview | no | |
dc.source.conference | Interface '03 | |
dc.source.conferencedate | 21/09/2003 | |
dc.source.conferencelocation | San Diego usa | |
imec.availability | Published - imec |
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