Corrosion inhibition by self-assembled monolayers for enhanced wire bonding on Cu surfaces

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Authors

Whelan, Caroline; Kinsella, Michael; Carbonell, Laure; Ho, Meng; Maex, Karen

Issue

2_4

Journal

Microelectronic Engineering

Volume

70

Title

Corrosion inhibition by self-assembled monolayers for enhanced wire bonding on Cu surfaces

Publication type

Journal article

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