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MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes

dc.contributor.authorWouters, Dirk
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorSchwitters, Michael
dc.contributor.authorJohnson, Jo
dc.contributor.authorVander Meeren, Hans
dc.contributor.authorMonchoix, H.
dc.contributor.authorMitaut, C.
dc.contributor.authorVan Autryve, L.
dc.contributor.authorCaputa, C.
dc.contributor.authorZambrano, R.
dc.date.accessioned2021-10-15T07:50:14Z
dc.date.available2021-10-15T07:50:14Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8408
dc.sourceIIOimport
dc.titleMOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
dc.typeMeeting abstract
dc.contributor.imecauthorEveraert, Jean-Luc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage388
dc.source.endpage389
dc.source.conference15th International Symposium on Integrated Ferroelectrics - ISIF
dc.source.conferencedate9/03/2003
dc.source.conferencelocationColorado Springs, CO USA
imec.availabilityPublished - open access


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