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The impact of Fe and Cu on the minority carrier lifetime of P and N-type silicon wafers
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Authors
Rotondaro, Antonio
;
Hurd, Trace
;
Kaniava, Arvydas
;
Vanhellemont, Jan
;
Simoen, Eddy
;
Heyns, Marc
;
Claeys, Cor
;
Brown, G.
Conference
ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo
Title
The impact of Fe and Cu on the minority carrier lifetime of P and N-type silicon wafers
Publication type
Proceedings paper
Embargo date
9999-12-31
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