Authors

Rotondaro, Antonio; Hurd, Trace; Schmidt, Harald; Teerlinck, Ivo; Heyns, Marc; Claeys, Cor

Conference

Ultraclean Semiconductor Processing Technology and Surface Chemical Cleaning and Passivation

Title

Outplating of metallic contaminants on silicon wafers from diluted acid solutions

Publication type

Proceedings paper

Embargo date

9999-12-31