Characterization of nano-laminate structure using grazing incidence XRD and ATR-FTIR

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Authors
Zhao, Chao; De Gendt, Stefan; Caymax, Matty; Heyns, Marc; Cosnier, Vincent; Maes, Jan; Roebben, G.; Van der Biest, O.
Conference
Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
Title
Characterization of nano-laminate structure using grazing incidence XRD and ATR-FTIR
Publication type
Proceedings paper
Embargo date
9999-12-31
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