Authors

Beckx, Stephan; Demand, Marc; Locorotondo, Sabrina; Henson, K.; Claes, Martine; Paraschiv, Vasile; Shamiryan, Denis; Jaenen, Patrick; Boullart, Werner; De Gendt, Stefan; Biesemans, Serge; Vanhaelemeersch, Serge; Vertommen, Johan; Coenegrachts, Bart

Conference

Workshop on Dielectrics in Microelectronics - WODIM

Title

Implementation of high-K and metal gate materials for the 45nm node and beyond: gate patterning development

Publication type

Oral presentation