Publication:

Implementation of high-K and metal gate materials for the 45nm node and beyond: gate patterning development

Date

2004
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Author(s)

Beckx, Stephan  
;
Demand, Marc  
;
Locorotondo, Sabrina  
;
Henson, K.
;
Claes, Martine  
;
Paraschiv, Vasile  
;
Shamiryan, Denis
;
Jaenen, Patrick  
;
Boullart, Werner  
;
De Gendt, Stefan  
;
Biesemans, Serge  
;
Vanhaelemeersch, Serge  
;
Vertommen, Johan
;
Coenegrachts, Bart  

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