Publication:
Implementation of high-K and metal gate materials for the 45nm node and beyond: gate patterning development
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2021 since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations
Metrics
Views
2021 since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations