Publication:
Implementation of high-K and metal gate materials for the 45nm node and beyond: gate patterning development
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2034 since deposited on 2021-10-15
3last month
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Acq. date: 2026-10-08
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Statistics
Views
2034 since deposited on 2021-10-15
3last month
3last week
Acq. date: 2026-10-08
Citations