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MTF test system with AC based dynamic joule correction for electromigration tests on interconnects
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Authors
Biesemans, L.
;
Schepers, K.
;
Vanstreels, Kris
;
D'Haen, Jan
;
De Ceuninck, Ward
;
D'Olieslaeger, Marc
Issue
9_11
Journal
Microelectronics Reliability
Volume
44
Title
MTF test system with AC based dynamic joule correction for electromigration tests on interconnects
Publication type
Journal article
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