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MTF test system with AC based dynamic joule correction for electromigration tests on interconnects

dc.contributor.authorBiesemans, L.
dc.contributor.authorSchepers, K.
dc.contributor.authorVanstreels, Kris
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorD'Olieslaeger, Marc
dc.date.accessioned2021-10-15T12:44:05Z
dc.date.available2021-10-15T12:44:05Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8590
dc.sourceIIOimport
dc.titleMTF test system with AC based dynamic joule correction for electromigration tests on interconnects
dc.typeProceedings paper
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Ceuninck, Ward::0000-0002-4630-5569
dc.contributor.orcidimecD'Olieslaeger, Marc::0000-0001-7951-8037
dc.source.peerreviewno
dc.source.beginpage1849
dc.source.endpage1854
dc.source.conferenceProceedings of the 15th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF
dc.source.conferencedate4/10/2004
dc.source.conferencelocationZürich Switzerland
imec.availabilityPublished - imec


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