Ni silicide morphology on small features

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Authors
Chamirian, Oxana; Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; de Potter de ten Broeck, Muriel; Vrancken, Christa; Lindsay, Richard; Maex, Karen
Conference
Silicon Front-End Junction Formation - Physics and Technology
Title
Ni silicide morphology on small features
Publication type
Proceedings paper
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