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Modification of nanoporous silica structures by fluorocarbon plasma treatment

dc.contributor.authorCho, W.
dc.contributor.authorSaxena, R.
dc.contributor.authorRodriguez, O.
dc.contributor.authorAchanta, R.
dc.contributor.authorOjha, M.
dc.contributor.authorPlawsky, J.L.
dc.contributor.authorGill, W.N.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-15T12:52:11Z
dc.date.available2021-10-15T12:52:11Z
dc.date.issued2004-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8682
dc.sourceIIOimport
dc.titleModification of nanoporous silica structures by fluorocarbon plasma treatment
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage103
dc.source.endpage108
dc.source.conferenceMaterials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics
dc.source.conferencedate12/04/2004
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 812


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