Accurate electrical activation characterization of CMOS ultra-shallow profiles

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Authors
Clarysse, Trudo; Dortu, Fabian; Vanhaeren, Danielle; Hoflijk, Ilse; Geenen, Luc; Janssens, Tom; Loo, Roger; Vandervorst, Wilfried; Pawlak, Bartek; Ouzeaud, V.; Defranoux, C.; Faifer, V.N.; Current, M.I.
Journal
Materials Science and Engineering B
Volume
114-115
Title
Accurate electrical activation characterization of CMOS ultra-shallow profiles
Publication type
Journal article
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