Publication:

Accurate electrical activation characterization of CMOS ultra-shallow profiles

Date

2004
Journal article
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Author(s)

Clarysse, Trudo
;
Dortu, Fabian
;
Vanhaeren, Danielle  
;
Hoflijk, Ilse  
;
Geenen, Luc
;
Janssens, Tom
;
Loo, Roger  
;
Vandervorst, Wilfried  
;
Pawlak, Bartek  
;
Ouzeaud, V.
;
Defranoux, C.
;
Faifer, V.N.
;
Current, M.I.

Journal

Materials Science and Engineering B

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1959 since deposited on 2021-10-15
Acq. date: 2026-01-07

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1959 since deposited on 2021-10-15
Acq. date: 2026-01-07

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