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Correlation between stress-induced leakage current (SILC) and the HfO2 bulk trap density in a SiO2/HfO2 stack
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2013 since deposited on 2021-10-15
Acq. date: 2025-10-23
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2013 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations