Publication:
Plasma nitrided silicon rich oxide as an extension to ultra-thin nitrided oxide gate dielectrics
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1907 since deposited on 2021-10-15
4last month
Acq. date: 2026-08-07
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Statistics
Views
1907 since deposited on 2021-10-15
4last month
Acq. date: 2026-08-07
Citations