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Initial assessment of the lithographic impact of the use of hard pellicles : an overview
Publication:
Initial assessment of the lithographic impact of the use of hard pellicles : an overview
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Bisschop, Peter
;
Kocsis, Michael
;
Bruls, R.
;
Grenville, A.
;
Van Peski, C.
Journal
Abstract
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1962
since deposited on 2021-10-15
415
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1962
since deposited on 2021-10-15
415
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations