Authors

De Bisschop, Peter; Kocsis, Michael; Bruls, R.; Van Peski, C.; Grenville, A.

Issue

2

Journal

Journal of Microlithography, Microfabrication and Microsystems

Volume

3

Title

Initial assessment of the impact of a hard pellicle on imaging using a 193 nm step-and-scan system

Publication type

Journal article