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Requirements of PECVD SiNx:H layers for bulk passivation of mc-Si
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Authors
Dekkers, Harold
;
De Wolf, Stefaan
;
Agostinelli, Guido
;
Duerinckx, Filip
;
Beaucarne, Guy
Conference
Technical Digest of the 14th International Photovoltaic Science and Engineering Conference - PVSEC-14
Title
Requirements of PECVD SiNx:H layers for bulk passivation of mc-Si
Publication type
Proceedings paper
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