Alpha-Ta formation and its impact on electromigration

Thumbnail
View/open
Metadata
Show full item record
Authors
Demuynck, Steven; Tokei, Zsolt; Bruynseraede, Christophe; Michelon, Julien; Maex, Karen
Conference
Advanced Metallization Conference 2003
Title
Alpha-Ta formation and its impact on electromigration
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections