Show simple item record

Alpha-Ta formation and its impact on electromigration

dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBruynseraede, Christophe
dc.contributor.authorMichelon, Julien
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T13:12:36Z
dc.date.available2021-10-15T13:12:36Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8833
dc.sourceIIOimport
dc.titleAlpha-Ta formation and its impact on electromigration
dc.typeProceedings paper
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage355
dc.source.endpage359
dc.source.conferenceAdvanced Metallization Conference 2003
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XIX


Files in this item

Thumbnail
Name:
8868.pdf
Size:
516.2Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record