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Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey

dc.contributor.authorDeweerd, Wim
dc.contributor.authorKaushik, Vidya
dc.contributor.authorChen, J.
dc.contributor.authorShimamoto, Y.
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPantisano, Luigi
dc.contributor.authorEyckens, Brenda
dc.contributor.authorMaes, J.W.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-15T13:14:14Z
dc.date.available2021-10-15T13:14:14Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8843
dc.sourceIIOimport
dc.titlePotential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey
dc.typeProceedings paper
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conference13th Workshop on Dielectrics in Microelectronics - WODIM
dc.source.conferencedate28/06/2004
dc.source.conferencelocationKinsale Ireland
imec.availabilityPublished - imec


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