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Methodology to assess the reliability behavior of RF MEMS

dc.contributor.authorDubuc, D.
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorMelle, S.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMertens, Robert
dc.contributor.authorPons, P.
dc.contributor.authorGrenier, K.
dc.contributor.authorPlana, R.
dc.date.accessioned2021-10-15T13:17:24Z
dc.date.available2021-10-15T13:17:24Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8863
dc.sourceIIOimport
dc.titleMethodology to assess the reliability behavior of RF MEMS
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage61
dc.source.endpage64
dc.source.conference34th European Microwave Conference
dc.source.conferencedate12/10/2004
dc.source.conferencelocationAmsterdam The Netherlands
imec.availabilityPublished - imec
imec.internalnotesVol. 1


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