Authors

Eneman, Geert; Simoen, Eddy; Delhougne, Romain; Gaubas, Eugenijus; Simons, Veerle; Roussel, Philippe; Verheyen, Peter; Lauwers, Anne; Loo, Roger; Vandervorst, Wilfried; De Meyer, Kristin; Claeys, Cor

Conference

Workshop on Defects Relevant to Engineering Advanced Silicon-based Devices - CADRES

Title

Defect analysis of strained silicon on thin strain-relaxed buffer layers for high mobility Transistors

Publication type

Oral presentation