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Defect analysis of strained silicon on thin strain-relaxed buffer layers for high mobility Transistors

dc.contributor.authorEneman, Geert
dc.contributor.authorSimoen, Eddy
dc.contributor.authorDelhougne, Romain
dc.contributor.authorGaubas, Eugenijus
dc.contributor.authorSimons, Veerle
dc.contributor.authorRoussel, Philippe
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLauwers, Anne
dc.contributor.authorLoo, Roger
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-15T13:20:25Z
dc.date.available2021-10-15T13:20:25Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8880
dc.sourceIIOimport
dc.titleDefect analysis of strained silicon on thin strain-relaxed buffer layers for high mobility Transistors
dc.typeOral presentation
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceWorkshop on Defects Relevant to Engineering Advanced Silicon-based Devices - CADRES
dc.source.conferencedate26/09/2004
dc.source.conferencelocationCatania Italy
imec.availabilityPublished - imec


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